Fabrication of 100-Oriented (Na0.5K0.5)NbO3--BaZrO3--(Bi0.5Li0.5)TiO3 Films on Si Substrate Using LaNiO3 Layer
0.92(Na 0.5 K 0.5 )NbO 3 --0.06BaZrO 3 --0.02(Bi 0.5 Li 0.5 )TiO 3 (NKN--BZ--BLT) thin films were fabricated by pulsed laser deposition (PLD) on a (100)Si substrate on which a 100-oriented LaNiO 3 (LNO) bottom layer was fabricated by the chemical solution deposition method. The NKN--BZ--BLT films we...
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Veröffentlicht in: | Jpn J Appl Phys 2012-09, Vol.51 (9), p.09LA06-09LA06-5 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | 0.92(Na 0.5 K 0.5 )NbO 3 --0.06BaZrO 3 --0.02(Bi 0.5 Li 0.5 )TiO 3 (NKN--BZ--BLT) thin films were fabricated by pulsed laser deposition (PLD) on a (100)Si substrate on which a 100-oriented LaNiO 3 (LNO) bottom layer was fabricated by the chemical solution deposition method. The NKN--BZ--BLT films were characterized by X-ray diffraction (XRD) analysis, $\theta/2\theta$ scan and $\psi$--$2\theta/\omega$ scan, scanning electron microscopy (SEM), and transmission electron microscopy (TEM). The properties were compared with those of the NKN--BZ--BLT film deposited on the (111)Pt/Ti/SiO 2 /(100)Si substrate. We demonstrated that the LNO layer plays an important role in obtaining 100-oriented NKN--BZ--BLT films on the Si substrate. SEM surface and cross-sectional images showed that the NKN--BZ--BLT films fabricated at a substrate temperature of 800 °C had a high density and a relatively smooth surface. From the TEM image, this NKN--BZ--BLT film fabricated at 800 °C was composed of the columnar grains and some vertical-long pores could be observed. The energy dispersive X-ray (EDX) analysis showed that the LNO layer is decomposed to La 2 NiO 4 by its reaction with Nb. The dielectric properties showed that the NKN--BZ--BLT film on the LNO electrode had a small dielectric constant of 82, compared with the NKN--BZ--BLT film ($\varepsilon_{\text{r}} = 3127$) on the (111)Pt/Ti/SiO 2 /(100)Si substrate. This difference is due to the polarization direction of the film and the polarization axis of the NKN--BZ--BLT film on the LNO electrode exists in a direction perpendicular to the surface of the substrate. However, the NKN--BZ--BLT film on LNO showed a small $P_{\text{r}}$ value. This is due to the dispersion of Ni from the LNO layer. |
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ISSN: | 0021-4922 1347-4065 |
DOI: | 10.1143/JJAP.51.09LA06 |