Excimer laser with highly coherent radiation

Experimental studies aimed at the optimisation of an unstable resonator of an ArF electric-discharge laser are performed. Several optical schemes of an unstable resonator of a single-module laser are proposed and investigated. It is shown that the laser developed on the basis of these schemes is cha...

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Veröffentlicht in:	Quantum electronics (Woodbury, N.Y.) N.Y.), 2003-08, Vol.33 (8), p.689-694
Hauptverfasser:	Atezhev, Vladimir V, Vartapetov, Sergei K, Zhukov, A N, Kurzanov, M A, Obidin, Aleksei Z
Format:	Artikel
Sprache:	eng
Schlagworte:	ARGON COMPOUNDS ARGON FLUORIDES CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS COHERENCE LENGTH COHERENT RADIATION DIMENSIONS ELECTRIC DISCHARGES ELECTROMAGNETIC RADIATION ELECTRONIC EQUIPMENT EXCIMER LASERS FLUORIDES FLUORINE COMPOUNDS GAS LASERS HALIDES HALOGEN COMPOUNDS LASERS LENGTH OPTIMIZATION PULSES RADIATIONS RARE GAS COMPOUNDS RESONATORS
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Beschreibung
Zusammenfassung:	Experimental studies aimed at the optimisation of an unstable resonator of an ArF electric-discharge laser are performed. Several optical schemes of an unstable resonator of a single-module laser are proposed and investigated. It is shown that the laser developed on the basis of these schemes is characterised by a high coherence (the spatial coherence length is 1 - 10 mm and the temporal coherence length is 0.5 - 30 mm at a pulse energy of 40 - 290 mJ). (special issue devoted to the memory of academician a m prokhorov)
ISSN:	1063-7818 1468-4799
DOI:	10.1070/QE2003v033n08ABEH002479