Fabrication of textured SnO2 transparent conductive films using self-assembled Sn nanospheres

We present a novel method to fabricate textured surfaces on transparent conductive SnO2 films by processing substrates through a bottom-up technique with potential for industrially scalable production. The substrate processing consists of three steps: deposition of precursor Sn films on glass substr...

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Veröffentlicht in:Japanese Journal of Applied Physics 2018-06, Vol.57 (6)
Hauptverfasser: Fukumoto, Michitaka, Nakao, Shoichiro, Hirose, Yasushi, Hasegawa, Tetsuya
Format: Artikel
Sprache:eng
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Zusammenfassung:We present a novel method to fabricate textured surfaces on transparent conductive SnO2 films by processing substrates through a bottom-up technique with potential for industrially scalable production. The substrate processing consists of three steps: deposition of precursor Sn films on glass substrates, formation of a self-assembled Sn nanosphere layer with reductive annealing, and conversion of Sn to SnO2 by oxidative annealing. Ta-doped SnO2 films conformally deposited on the self-assembled nanospherical SnO2 templates exhibited attractive optical and electrical properties, namely, enhanced haze values and low sheet resistances, for applications as transparent electrodes in photovoltaics.
ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.57.060307