Nanofabrication of millimeter-level nanostructure via laser-focused atomic deposition
We describe the fabrication of a large area of chromium nanogratings formed by laser focusing techniques. The focusing occurs in an elliptical laser standing-wave field, resulting in a line array covering an area of approximately 1.5 × 1.5 mm2 with a spacing of 212.78 nm. The experimental arrangemen...
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Veröffentlicht in: | Applied physics express 2018-09, Vol.11 (9), p.92003 |
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Hauptverfasser: | , , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | We describe the fabrication of a large area of chromium nanogratings formed by laser focusing techniques. The focusing occurs in an elliptical laser standing-wave field, resulting in a line array covering an area of approximately 1.5 × 1.5 mm2 with a spacing of 212.78 nm. The experimental arrangement for laser focusing is described. Improvements in the technique and potential applications are also mentioned. |
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ISSN: | 1882-0778 1882-0786 |
DOI: | 10.7567/APEX.11.092003 |