Nanofabrication of millimeter-level nanostructure via laser-focused atomic deposition

We describe the fabrication of a large area of chromium nanogratings formed by laser focusing techniques. The focusing occurs in an elliptical laser standing-wave field, resulting in a line array covering an area of approximately 1.5 × 1.5 mm2 with a spacing of 212.78 nm. The experimental arrangemen...

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Veröffentlicht in:Applied physics express 2018-09, Vol.11 (9), p.92003
Hauptverfasser: Zhang, Tong, Yin, Cong, Zhao, Yuejin, Qian, Jin, Wang, Jianbo, Shi, Chunying
Format: Artikel
Sprache:eng
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Zusammenfassung:We describe the fabrication of a large area of chromium nanogratings formed by laser focusing techniques. The focusing occurs in an elliptical laser standing-wave field, resulting in a line array covering an area of approximately 1.5 × 1.5 mm2 with a spacing of 212.78 nm. The experimental arrangement for laser focusing is described. Improvements in the technique and potential applications are also mentioned.
ISSN:1882-0778
1882-0786
DOI:10.7567/APEX.11.092003