Patterning of Sin and SiO2 Nanostructures for 3D Electronic Devices at Low Temperatures

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Veröffentlicht in:	Meeting abstracts (Electrochemical Society) 2024-11, Vol.MA2024-02 (20), p.1797-1797
Hauptverfasser:	Lill, Thorsten, Barsukov, Yuri, Oh, Youn-Jin, Kaganowich, Igor, Singh, Harmeet
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title	Patterning of Sin and SiO2 Nanostructures for 3D Electronic Devices at Low Temperatures
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