Investigation of Thermal Stability of RFPVD TiAl Metal Alloy

In this paper, thermal stability, composition ratio and crystallinity of radio frequency PVD (RFPVD) TiAl metal alloy are investigated, and their effects on work function are studied. An experimental method, to measure TiAl sheet resistance variation before and after annealing, was used to evaluate...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Zhang, Ziying, Ping, Yanlei, Wang, Xiaona, Xiao, Haibo, Chen, Yong, Jing, Xuezheng, Zhang, Beichao
Format:	Tagungsbericht
Sprache:	eng
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!