Investigation of Thermal Stability of RFPVD TiAl Metal Alloy

Investigation of Thermal Stability of RFPVD TiAl Metal Alloy

In this paper, thermal stability, composition ratio and crystallinity of radio frequency PVD (RFPVD) TiAl metal alloy are investigated, and their effects on work function are studied. An experimental method, to measure TiAl sheet resistance variation before and after annealing, was used to evaluate...

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Hauptverfasser: Zhang, Ziying, Ping, Yanlei, Wang, Xiaona, Xiao, Haibo, Chen, Yong, Jing, Xuezheng, Zhang, Beichao
Format: Tagungsbericht
Sprache:eng
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Zusammenfassung:In this paper, thermal stability, composition ratio and crystallinity of radio frequency PVD (RFPVD) TiAl metal alloy are investigated, and their effects on work function are studied. An experimental method, to measure TiAl sheet resistance variation before and after annealing, was used to evaluate the interface diffusion of TiAl in the metal stack under varied barrier films. The barrier layer materials included ALD TiN, PVD TiN and ALD TaN.
ISSN:1938-5862
1938-6737
DOI:10.1149/1.3694346