Novel Electrostatically Doped Planar Field-Effect Transistor for High Temperature Applications
In this paper, we investigate by simulation and by evaluation of experimental data the feasibility of an electrostatically doped and therefore voltage-programmable, planar, CMOS-compatible field-effect-transistor (FET) structure which is based on our already published Si-nanowire (SiNW) technology....
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Veröffentlicht in: | ECS transactions 2014-08, Vol.64 (12), p.11-24 |
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Hauptverfasser: | , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | In this paper, we investigate by simulation and by evaluation of experimental data the feasibility of an electrostatically doped and therefore voltage-programmable, planar, CMOS-compatible field-effect-transistor (FET) structure which is based on our already published Si-nanowire (SiNW) technology. The key technology for this dual-gated general purpose FET contains Schottky S/D junctions on a silicon-on-insulator (SOI) platform. In combination with electrostatic doping and a dual-gate configuration, the Schottky junctions significantly increase the temperature robustness of the device. |
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ISSN: | 1938-5862 1938-6737 |
DOI: | 10.1149/06412.0011ecst |