Room Temperature Bonding of Polymer to Glass Wafers Using Surface Activated Bonding (SAB) Method

A new process for room temperature bonding of polymer to polymer and polymer to glass wafers was developed. The room temperature bonding of PEN (polyethylene naphthalate) -PEN, PET (polyethylene terephthalate) -PET, Kapton-PEN, Kapton-PET, PEN-Glass (non-alkali glass) and Kapton-Glass was performed...

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Veröffentlicht in:	ECS transactions 2013-03, Vol.50 (7), p.297-302
Hauptverfasser:	Matsumae, Takashi, Nakano, Masashi, Matsumoto, Yoshiie, Suga, Tadatomo
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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