Room Temperature Bonding of Polymer to Glass Wafers Using Surface Activated Bonding (SAB) Method

A new process for room temperature bonding of polymer to polymer and polymer to glass wafers was developed. The room temperature bonding of PEN (polyethylene naphthalate) -PEN, PET (polyethylene terephthalate) -PET, Kapton-PEN, Kapton-PET, PEN-Glass (non-alkali glass) and Kapton-Glass was performed by the modified SAB method. No void is observed at the bonding interface with the optimized condition and bonding interface is so strong that the failure occurred not at the bonded interface but rather in the bulk polymer.