Sb doping influence on structural properties of ZnO thin films

Pure and Sb doped ZnO thin films were homogeneously prepared at room temperature on the soda-lime glass substrates (SLG) via the spin coating technique. The effects of the Sb ratio on structural properties, morphological properties and optical properties were studied via x-ray diffraction (XRD) device, scanning electron microscopy (SEM), and ultraviolet-visible (UV-vis) spectrometry, respectively. Crystalline size (D), the (hkl) planes, and dislocation density (δ) for ZnO thin films were investigated via the XRD pattern. The influence of Sb doping on the preferred crystal orientation and lattice parameters of ZnO thin films were discussed in detail. Optical measurements of ZnO thin films with 0, 1, 2 and 3% Sb concentrations showed a significant effect as a function of Sb dopants on the optical energy band gap. All of the SEM images indicated that while pure ZnO thin films had an apparent nanofiber structure, nanofiber structures disappeared with the increase of doping ratio, and more homogeneous films were obtained.