Wet etching and passivation of GaSb-based very long wavelength infrared detectors

The etching and passivation processes of very long wavelength infrared (VLWIR) detector based on the InAs/GaSb/AlSb type-II superlattice have been studied. By studying the effect of each component in the citric acid solution (citric acid, phosphoric acid, hydrogen peroxide, deionized water), the bes...

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Veröffentlicht in:	Chinese physics B 2022-05, Vol.31 (6), p.68503-153
Hauptverfasser:	Xu, Xue-Yue, Jiang, Jun-Kai, Chen, Wei-Qiang, Cui, Su-Ning, Zhou, Wen-Guang, Li, Nong, Chang, Fa-Ran, Wang, Guo-Wei, Xu, Ying-Qiang, Jiang, Dong-Wei, Wu, Dong-Hai, Hao, Hong-Yue, Niu, Zhi-Chuan
Format:	Artikel
Sprache:	eng
Schlagworte:	InAs/GaSb/AlSb superlattice passivation very long wavelength infrared (VLWIR) detector wet etching
Online-Zugang:	Volltext
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