Dielectric particle lofting from dielectric substrate exposed to low-energy electron beam

The particle-in-cell simulation is applied to study a nanometer-sized dielectric particle lofting from a dielectric substrate exposed to a low-energy electron beam. The article discusses the electron accumulation between a substrate and a particle lying on it, which can cause the particle lofting. The results are of interest for dust mitigation in the semiconductor industry, the lunar exploration, and the explanation of the dust levitation.