A hybrid method for lattice image reconstruction and deformation analysis

In nanoscale deformation measurement, geometrical phase analysis (GPA) is typically a powerful tool to investigate the deformation, especially in high resolution transmission electron microscopy images, which also has been used in various fields. The traditional GPA method using the fast Fourier transform is based on the relationship between the displacement and the phase difference. In this paper, a hybrid method for lattice image reconstruction and deformation analysis was developed. The nano-grid method based on real space lattice image processing was proposed and developed to enable the measurement of nanoscale interface flatness, the thickness of different components. The hybrid method with simultaneous real space and frequency domain processing was proposed to compensate for the shortcomings of the GPA method for measuring samples with large deformations or containing cracks while retaining its measurement accuracy.