Influence of annealing temperature on the optoelectronic properties of ITZO thin films

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Veröffentlicht in:	Nanotechnology 2021-10, Vol.32 (40), p.405701
Hauptverfasser:	Ding, Anning, You, Ruisong, Luo, Shulin, Gong, Jianhong, Song, Shumei, Wang, Kunlun, Dai, Bo, Sun, Hui
Format:	Artikel
Sprache:	eng
Schlagworte:	annealing temperature ITZO thin films optoelectronic properties RF magnetron sputtering
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source	IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link
subjects	annealing temperature ITZO thin films optoelectronic properties RF magnetron sputtering
title	Influence of annealing temperature on the optoelectronic properties of ITZO thin films
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