Monolayer doping of germanium by phosphorus-containing molecules

The DPP (diethyl 1-propylphosphonate) and ODPA (octadecylphosphonic acid) molecules are studied as precursors for the monolayer doping (MLD) of germanium. Their adsorption behaviour is investigated, revealing different physicochemical interactions between the phosphorus-containing molecules and the...

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Veröffentlicht in:	Nanotechnology 2018-11, Vol.29 (46), p.465702-465702
Hauptverfasser:	Sgarbossa, F, Carturan, S M, De Salvador, D, Rizzi, G A, Napolitani, E, Maggioni, G, Raniero, W, Napoli, D R, Granozzi, G, Carnera, A
Format:	Artikel
Sprache:	eng
Schlagworte:	chemical doping doping germanium monolayer surface chemistry
Online-Zugang:	Volltext
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