A preparation technology of micro-structure glass based on mixed micro and nano powders

This paper reports a method for the preparation of glass by reflowing commercial mixed micro and nano powders. High-quality micro-structure glass is formed by a microfabrication process combined with reflow process of the mixed micro and nano powders. The quality of glass prepared by different compo...

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Veröffentlicht in:	Journal of micromechanics and microengineering 2022-06, Vol.32 (6), p.65009
Hauptverfasser:	Zhu, Minjie, Liu, Rui, Sang, Hongbo, Du, Xiaohui, Liu, Shuai, Liu, Xinyu, Ji, Kemeng, Xiong, Yanwei, Li, Xiaojuan, Liu, Yifang, Wang, Lingyun
Format:	Artikel
Sprache:	eng
Schlagworte:	glass reflow MEMS applications micro-structure glass mixed micro and nano powders
Online-Zugang:	Volltext
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