A preparation technology of micro-structure glass based on mixed micro and nano powders

This paper reports a method for the preparation of glass by reflowing commercial mixed micro and nano powders. High-quality micro-structure glass is formed by a microfabrication process combined with reflow process of the mixed micro and nano powders. The quality of glass prepared by different components was investigated and analyzed. Characterization of the formed glass micro-structure was performed by combining scanning electrical microscopy, energy dispersive spectroscopy, x-ray diffraction, and x-ray photoelectron spectroscopy. The glass reflow results were compared with the anodic bonding sample, which showed micro-structure glass prepared by our method was well-formed with high density and transparency. These results may inspire new possibilities for glass-based microsystems and MEMS applications.