A preparation technology of micro-structure glass based on mixed micro and nano powders

A preparation technology of micro-structure glass based on mixed micro and nano powders

This paper reports a method for the preparation of glass by reflowing commercial mixed micro and nano powders. High-quality micro-structure glass is formed by a microfabrication process combined with reflow process of the mixed micro and nano powders. The quality of glass prepared by different compo...

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Veröffentlicht in:Journal of micromechanics and microengineering 2022-06, Vol.32 (6), p.65009
Hauptverfasser: Zhu, Minjie, Liu, Rui, Sang, Hongbo, Du, Xiaohui, Liu, Shuai, Liu, Xinyu, Ji, Kemeng, Xiong, Yanwei, Li, Xiaojuan, Liu, Yifang, Wang, Lingyun
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Sprache:eng
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glass reflow
MEMS applications
micro-structure glass
mixed micro and nano powders
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container_issue 6
container_start_page 65009
container_title Journal of micromechanics and microengineering
container_volume 32
creator Zhu, Minjie
Liu, Rui
Sang, Hongbo
Du, Xiaohui
Liu, Shuai
Liu, Xinyu
Ji, Kemeng
Xiong, Yanwei
Li, Xiaojuan
Liu, Yifang
Wang, Lingyun
description This paper reports a method for the preparation of glass by reflowing commercial mixed micro and nano powders. High-quality micro-structure glass is formed by a microfabrication process combined with reflow process of the mixed micro and nano powders. The quality of glass prepared by different components was investigated and analyzed. Characterization of the formed glass micro-structure was performed by combining scanning electrical microscopy, energy dispersive spectroscopy, x-ray diffraction, and x-ray photoelectron spectroscopy. The glass reflow results were compared with the anodic bonding sample, which showed micro-structure glass prepared by our method was well-formed with high density and transparency. These results may inspire new possibilities for glass-based microsystems and MEMS applications.
doi_str_mv 10.1088/1361-6439/ac68cb
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High-quality micro-structure glass is formed by a microfabrication process combined with reflow process of the mixed micro and nano powders. The quality of glass prepared by different components was investigated and analyzed. Characterization of the formed glass micro-structure was performed by combining scanning electrical microscopy, energy dispersive spectroscopy, x-ray diffraction, and x-ray photoelectron spectroscopy. The glass reflow results were compared with the anodic bonding sample, which showed micro-structure glass prepared by our method was well-formed with high density and transparency. 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subjects glass reflow
MEMS applications
micro-structure glass
mixed micro and nano powders
title A preparation technology of micro-structure glass based on mixed micro and nano powders
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