Electric field sensing characteristics of ZnO/SiO2/Si surface acoustic wave devices

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Veröffentlicht in:	Journal of micromechanics and microengineering 2022-05, Vol.32 (5)
Hauptverfasser:	Liu, Zhirong, Zhu, Min, Xu, Caihua, Bao, Wenqi, Xie, Liqiang, Zhang, Haitao, Han, Yueqi
Format:	Artikel
Sprache:	eng
Schlagworte:	electric field sensor multilayer structure surface acoustic wave ZnO
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doi_str_mv	10.1088/1361-6439/ac5b1c
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subjects	electric field sensor multilayer structure surface acoustic wave ZnO
title	Electric field sensing characteristics of ZnO/SiO2/Si surface acoustic wave devices
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