High-power, highly stable KrF laser with a pulse repetition rate

An electric-discharge KrF laser with an average output power of is developed and studied. A number of new design features are related to the use of a laser chamber based on an ceramic tube. A high power and pulse repetition rate are achieved by using a volume discharge with lateral preionisation by the UV radiation of a creeping discharge in the form of a homogeneous plasma sheet on the surface of a plane sapphire plate. Various generators for pumping the laser are studied. The maximum laser efficiency is 3.1 %, the maximum laser energy is , and the pulse duration at half maximum is . In the case of long-term operation at a pulse repetition rate of and an output power of , high stability of laser output energy is achieved using an all-solid-state pump system.