Microscope Image Comparator

The need for objective means of assessing the severity of imperfections such as digs and scratches on optically polished surfaces is discussed. Previously used inspection techniques are reviewed and it is concluded that measurement of the visibility of an image of a particular defect relative to tha...

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Veröffentlicht in:Optica acta 1984-06, Vol.31 (6), p.611-614
1. Verfasser: Baker, L.R.
Format: Artikel
Sprache:eng
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Zusammenfassung:The need for objective means of assessing the severity of imperfections such as digs and scratches on optically polished surfaces is discussed. Previously used inspection techniques are reviewed and it is concluded that measurement of the visibility of an image of a particular defect relative to that of a standard, by the use of a microscope image comparator, offers many advantages.
ISSN:0030-3909
DOI:10.1080/713821557