Optical Gratings Fabricated by Deposition of Liquid Crystalline Polymer Films with Linearly Polarized UV Laser

Polyimide layer on a glass substrate was exposed with a linearly-polarized UV laser through a photo-mask having line-and-space patterns of 2.2 μm. UV laser chemical vapor deposition of liquid crystalline polymer was carried out on the treated substrate. The deposited films showed optical diffraction...

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Veröffentlicht in:Molecular crystals and liquid crystals science and technology. Section A, Molecular crystals and liquid crystals Molecular crystals and liquid crystals, 1998-05, Vol.314 (1), p.267-272
Hauptverfasser: Itadani, Toshiaki, Saito, Koichi
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Sprache:eng
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Zusammenfassung:Polyimide layer on a glass substrate was exposed with a linearly-polarized UV laser through a photo-mask having line-and-space patterns of 2.2 μm. UV laser chemical vapor deposition of liquid crystalline polymer was carried out on the treated substrate. The deposited films showed optical diffraction due to periodic change of molecular orientation of liquid crystalline polymer. The efficiency of optical diffraction was changed with polarization of incident light.
ISSN:1058-725X
DOI:10.1080/10587259808042486