SEM and TEM Observation of Carbon Nano-Fibers Prepared by Hot Filament Assisted Sputtering

SEM and TEM Observation of Carbon Nano-Fibers Prepared by Hot Filament Assisted Sputtering

Carbon films were prepared by hot filament assisted sputtering. Pure argon was used as the sputtering gas. The substrate temperature was 600 °C and the filament temperature was about 2000 °C. Sample was inhomogeneous. Scanning electron microscope (SEM) and transmission electron microscope (TEM) imag...

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Veröffentlicht in:Molecular crystals and liquid crystals science and technology. Section A, Molecular crystals and liquid crystals Molecular crystals and liquid crystals, 2000-03, Vol.340 (1), p.713-717
Hauptverfasser: Kamimura, Kiichi, Matsumoto, Yuji, Oo, Myo Than, Nakao, Masato, Onuma, Yoshiharu
Format: Artikel
Sprache:eng
Schlagworte:
carbon
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
fiber
hot filament
Materials science
nano structure
Nanoscale materials and structures: fabrication and characterization
Physics
sputtering
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Zusammenfassung:Carbon films were prepared by hot filament assisted sputtering. Pure argon was used as the sputtering gas. The substrate temperature was 600 °C and the filament temperature was about 2000 °C. Sample was inhomogeneous. Scanning electron microscope (SEM) and transmission electron microscope (TEM) images showed that some part of films consisted of carbon nano fibers (not hollow but solid). Amorphous and polycrystalline phases were also detected by these measurements. No tube structure was observed by high resolution TEM. The diameter of the fiber was 10-30 nm.
ISSN:1058-725X
DOI:10.1080/10587250008025552