Planar electrostatic micromotors on the basis of the ferroelectric films

Planar electrostatic micromotors on the basis of the ferroelectric films

The principle of the operation of the step petalous micromotors based on the effect of the electrostatic rolling on the ferroelectric surface is considered. These micromotors produced by means of microelectronic technology are distinguished as being energy-intensive (more than 1 J/m 2 at 20-40 V vol...

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Veröffentlicht in:Integrated ferroelectrics 1999-07, Vol.23 (1-4), p.149-160
Hauptverfasser: Dyatlov, V. L., Kostsov, E. G.
Format: Artikel
Sprache:eng
Schlagworte:
electrostatics
Ferroelectric films
micromotor
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Zusammenfassung:The principle of the operation of the step petalous micromotors based on the effect of the electrostatic rolling on the ferroelectric surface is considered. These micromotors produced by means of microelectronic technology are distinguished as being energy-intensive (more than 1 J/m 2 at 20-40 V voltage) and they provide precise movement: the step ranges from 10 Å to 100 μm. The technical and experimental data are given characterizing the energetic and mechanical parameters of these micromotors.
ISSN:1058-4587
1607-8489
DOI:10.1080/10584589908210146