Effects of Ti/Ir top electrodes of PZT capacitors on the hydrogen related degradation
Hydrogen annealing damages on properties of PZT capacitors and a role of Ti/Ir hybrid structure top electrodes on capacitors are investigated in this study. It is demonstrated that the capacitors with Ti/Ir structure top electrodes improve a resistance against hydrogen related degradation. As the th...
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Veröffentlicht in: | Integrated ferroelectrics 2000-11, Vol.31 (1-4), p.367-376 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Hydrogen annealing damages on properties of PZT capacitors and a role of Ti/Ir hybrid structure top electrodes on capacitors are investigated in this study. It is demonstrated that the capacitors with Ti/Ir structure top electrodes improve a resistance against hydrogen related degradation. As the thickness ratio of Ti/Ir increases, the capacitors show enhanced endurance against hydrogen damages. Especially, PZT (350nm) capacitors with Ti(80nm)/Ir(20nm) hybrid top electrodes show only 26% decrease in nonvolatile polarizations (P*
r
) under ± 7V, while 67% of P*
r
of ferroelectric capacitors with Ir top electrodes is reduced after forming gas annealing at 250°C for 10min. Based on the XPS analysis, ferroelectric characteristics of PZT thin film capacitors are degraded by destruction of Pb-O bond into metallic Pb due to hydrogen anneal on the catalytic top electrodes (Ir, Pt). |
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ISSN: | 1058-4587 1607-8489 |
DOI: | 10.1080/10584580008215670 |