Effects of Ti/Ir top electrodes of PZT capacitors on the hydrogen related degradation

Hydrogen annealing damages on properties of PZT capacitors and a role of Ti/Ir hybrid structure top electrodes on capacitors are investigated in this study. It is demonstrated that the capacitors with Ti/Ir structure top electrodes improve a resistance against hydrogen related degradation. As the th...

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Veröffentlicht in:Integrated ferroelectrics 2000-11, Vol.31 (1-4), p.367-376
Hauptverfasser: Kim, Jiyoung, Koo, June-Mo, Kim, Tae Ho, Bang, Ilhwan
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Sprache:eng
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Zusammenfassung:Hydrogen annealing damages on properties of PZT capacitors and a role of Ti/Ir hybrid structure top electrodes on capacitors are investigated in this study. It is demonstrated that the capacitors with Ti/Ir structure top electrodes improve a resistance against hydrogen related degradation. As the thickness ratio of Ti/Ir increases, the capacitors show enhanced endurance against hydrogen damages. Especially, PZT (350nm) capacitors with Ti(80nm)/Ir(20nm) hybrid top electrodes show only 26% decrease in nonvolatile polarizations (P* r ) under ± 7V, while 67% of P* r of ferroelectric capacitors with Ir top electrodes is reduced after forming gas annealing at 250°C for 10min. Based on the XPS analysis, ferroelectric characteristics of PZT thin film capacitors are degraded by destruction of Pb-O bond into metallic Pb due to hydrogen anneal on the catalytic top electrodes (Ir, Pt).
ISSN:1058-4587
1607-8489
DOI:10.1080/10584580008215670