Studies of lattice positions and ranges of nitrogen, implanted into metals and AIIIBV crystals

The nuclear reactions 15 N(p,αγ) 12 C and 15 N(p,α) 12 C were used to determine the location and depth distributions of the implanted 15 N atoms in InP, InAs and InSb semiconductors. The behaviour of the implanted nitrogen atoms durings thermal treatment was also investigated. The yieldsof the 15 N(...

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Veröffentlicht in:Radiation effects and defects in solids 1990-08, Vol.114 (3), p.199-207
Hauptverfasser: Deev, A. S., Svetashov, P. A., Skakun, N. A., Grigor'ev, A. N., Ruzhitskij, V. V., Olejnik, V. A., Grinchenko, A. Ya
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Sprache:eng
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Zusammenfassung:The nuclear reactions 15 N(p,αγ) 12 C and 15 N(p,α) 12 C were used to determine the location and depth distributions of the implanted 15 N atoms in InP, InAs and InSb semiconductors. The behaviour of the implanted nitrogen atoms durings thermal treatment was also investigated. The yieldsof the 15 N(p, αγ) 12 C reaction were measured to determine the projected range of 15 N in A III B V . Nb. Ni, Zr Materials. The universal relation between the modified reduced range and the average reduced energy has been obtained for A III B V compounds. Measured are the orientational and energy dependences of the γ-ray yield from the 15 N(p, αγ) 12 C reaction excited by channeled protons in a Nb crystal. The obtained results show the shift of the maximum in the reaction yield distribution and the decrease ofthe full distribution width measured at half-maximum.
ISSN:1042-0150
1029-4953
DOI:10.1080/10420159008213097