Stability of He+ implanted waveguides in LiNbO3

Room temperature annealing processes are shown to reduce the damage in the guiding layer and therefore the optical attenuation of these waveguides. Preliminary results also suggest that these waveguides are free from optical damage effects at λ = 0 · 633 μm.

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Veröffentlicht in:International journal of electronics 1987-01, Vol.62 (1), p.153-155
Hauptverfasser: WEISS, B. L., NADEN, J. M.
Format: Artikel
Sprache:eng
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Zusammenfassung:Room temperature annealing processes are shown to reduce the damage in the guiding layer and therefore the optical attenuation of these waveguides. Preliminary results also suggest that these waveguides are free from optical damage effects at λ = 0 · 633 μm.
ISSN:0020-7217
1362-3060
DOI:10.1080/00207218708920962