A gas detection system on a single CMOS chip comprising capacitive, calorimetric, and mass-sensitive microsensors

A gas detection system on a single CMOS chip comprising capacitive, calorimetric, and mass-sensitive microsensors

A single-chip chemical microsensor system fabricated in industrial 0.8 /spl mu/m CMOS technology includes three different polymer-coated micromachined transducers. The chip forms an integral part of a handheld unit to detect volatile organics. On-chip circuitry includes signal conditioning, A/D-conv...

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Bibliographische Detailangaben
Hauptverfasser: Hagleitner, C., Lange, D., Kerness, N., Hierlemann, A., Brand, O., Baltes, H.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Chemical industry
Chemical technology
Chemical transducers
CMOS technology
Electrical equipment industry
Gas detectors
Microsensors
Plastics industry
Polymers
Textile industry
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Beschreibung
Zusammenfassung:A single-chip chemical microsensor system fabricated in industrial 0.8 /spl mu/m CMOS technology includes three different polymer-coated micromachined transducers. The chip forms an integral part of a handheld unit to detect volatile organics. On-chip circuitry includes signal conditioning, A/D-converters, filters, digital controller, and serial bus interface (I/sup 2/C).
DOI:10.1109/ISSCC.2002.993116