Analysis of electron transmission properties from EPL membrane masks

Analysis of electron transmission properties from EPL membrane masks

Summary form only given. In the present study, we investigate the electron transmission properties in 150-nm thick Si/sub 3/N/sub 4/ membrane masks exposed to high energy (E=100 keV) electrons with the modified electron scattering simulation. We report energy loss spectra and the angular distributio...

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Bibliographische Detailangaben
Hauptverfasser: Seko, C., Hayashi, H., Ono, K., Iriye, Y., Nomura, E.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Biomembranes
Electrons
Energy loss
Ionization
Light scattering
National electric code
Page description languages
Temperature
Throughput
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Beschreibung
Zusammenfassung:Summary form only given. In the present study, we investigate the electron transmission properties in 150-nm thick Si/sub 3/N/sub 4/ membrane masks exposed to high energy (E=100 keV) electrons with the modified electron scattering simulation. We report energy loss spectra and the angular distribution of transmitted electrons and compare the simulation and experimental results. We discuss the effect of temperature in the membrane masks on the shape of the zero-loss energy distribution.
DOI:10.1109/IMNC.2001.984134