Highly uniform and reproducible 850 nm vertical-cavity surface-emitting lasers grown by MOCVD

850 nm vertical-cavity surface-emitting lasers (VCSELs) were grown by metalorganic chemical vapor deposition (MOCVD). High uniformity of the Fabry-Perot cavity wavelength for VCSEL materials of /spl plusmn/0.15 % across a 3-in diameter wafer was achieved. Also, /spl plusmn/0.1 % Al composition unifo...

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Bibliographische Detailangaben
Hauptverfasser:	Jang, H.J., Song, Y.H., Jeong, B.J., Lee, K.H., Son, J.K., Lee, Y.H., Choi, D.G., Yang, S.S., Yang, J.W., Lim, K.Y., Yang, G.M.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Apertures Chemical lasers Fabry-Perot Laser theory MOCVD Optical surface waves Physics Surface emitting lasers Thickness control Vertical cavity surface emitting lasers
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Beschreibung
Zusammenfassung:	850 nm vertical-cavity surface-emitting lasers (VCSELs) were grown by metalorganic chemical vapor deposition (MOCVD). High uniformity of the Fabry-Perot cavity wavelength for VCSEL materials of /spl plusmn/0.15 % across a 3-in diameter wafer was achieved. Also, /spl plusmn/0.1 % Al composition uniformity of Al/sub 0.98/Ga/sub 0.02/As was obtained.
DOI:	10.1109/CLEOPR.2001.971098