Highly efficient electric-discharge ArF and KrF excimer lasers with He as a buffer gas

Highly efficient electric-discharge ArF and KrF excimer lasers with He as a buffer gas

The modified high-voltage excitation circuit of LC-inverter type providing high specific pump power in a very short time interval has been created. The use of this scheme allowed achieving excellent results of radiation energy and efficiency for ArF and KrF excimer lasers Using He as a buffer gas.

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Bibliographische Detailangaben
Hauptverfasser: Razhev, A.M., Bagayev, S.N., Zhupikov, A.A.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Circuits
Gas lasers
Helium
Inductance
Laser excitation
Laser theory
Optical pulses
Pump lasers
Switches
Voltage
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Beschreibung
Zusammenfassung:The modified high-voltage excitation circuit of LC-inverter type providing high specific pump power in a very short time interval has been created. The use of this scheme allowed achieving excellent results of radiation energy and efficiency for ArF and KrF excimer lasers Using He as a buffer gas.
DOI:10.1109/CLEOPR.2001.970809