Study of micromachined tunable filter and its potential application to tunable laser

Study of micromachined tunable filter and its potential application to tunable laser

There are a number of different ways to achieve tunability. Among these, MEMS technology offers a new approach to mechanically adjust the lasing cavity length to select the output wavelength. In this work, we report on the fabrication of a tunable Fabry-Perot filter based on the consideration of pro...

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Bibliographische Detailangaben
Hauptverfasser: Chou, B.C.S., Lin, W.T., Chiou, J.C.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Bridge circuits
Chemical lasers
Electrodes
Fiber lasers
Laser applications
Laser theory
Mirrors
Optical filters
Tunable circuits and devices
Voltage
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Beschreibung
Zusammenfassung:There are a number of different ways to achieve tunability. Among these, MEMS technology offers a new approach to mechanically adjust the lasing cavity length to select the output wavelength. In this work, we report on the fabrication of a tunable Fabry-Perot filter based on the consideration of process and material compatibility when this filter structure is to be fabricated directly onto the VCSEL wafers as a tunable laser.
DOI:10.1109/CLEOPR.2001.967903