Micromachined 60 GHz GaAs power sensor with integrated receiving antenna

Micromachined 60 GHz GaAs power sensor with integrated receiving antenna

A micromachined 60 GHz GaAs power sensor with a monolithically-integrated receiving antenna is presented. In this sensor configuration the thermoelectrical properties of AlGaAs-GaAs heterostructures are used, so that no external DC power supply is needed. First measurements with separate sensor and...

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Bibliographische Detailangaben
Hauptverfasser: Mutamba, K., Beilenhoff, K., Megej, A., Dorner, R., Genc, E., Fleckenstein, A., Heyman, P., Dickmann, J., Woelk, C., Hartnagel, H.L.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Antenna measurements
Biomembranes
Broadband antennas
Dipole antennas
Gallium arsenide
Heating
Receiving antennas
Resistors
Semiconductor device measurement
Thermal sensors
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Beschreibung
Zusammenfassung:A micromachined 60 GHz GaAs power sensor with a monolithically-integrated receiving antenna is presented. In this sensor configuration the thermoelectrical properties of AlGaAs-GaAs heterostructures are used, so that no external DC power supply is needed. First measurements with separate sensor and antenna structures on the same chip have shown a broadband sensor response as well as an excellent matching between the antenna and the sensor input.
ISSN:0149-645X
2576-7216
DOI:10.1109/MWSYM.2001.967361