Lifetime characterization of capacitive RF MEMS switches

Lifetime characterization of capacitive RF MEMS switches

The first experimental characterization of dielectric charging within capacitive RF MEMS switches has been demonstrated. Standard devices have been inserted into a time domain setup and their lifetimes have been characterized as a function of actuation voltage. Switch lifetimes were measured using a...

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Hauptverfasser: Goldsmith, C., Ehmke, J., Malczewski, A., Pillans, B., Eshelman, S., Yao, Z., Brank, J., Eberly, M.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Biomembranes
Dielectric measurements
Equations
Ohmic contacts
Passive circuits
Radiofrequency microelectromechanical systems
Switches
Tunable circuits and devices
Tunneling
Voltage
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Beschreibung
Zusammenfassung:The first experimental characterization of dielectric charging within capacitive RF MEMS switches has been demonstrated. Standard devices have been inserted into a time domain setup and their lifetimes have been characterized as a function of actuation voltage. Switch lifetimes were measured using a dual-pulse waveform with 30 to 65 V of actuation voltage. Resulting lifetimes were between 10/sup 4/ and 10/sup 8/ switch actuations, demonstrating an exponential relationship between lifetime and actuation voltage.
ISSN:0149-645X
2576-7216
DOI:10.1109/MWSYM.2001.966876