Interactive multimedia courseware for integrated circuit fabrication courses

Integrated circuit manufacturing no longer belongs to industry, but is a flourishing area in academia. The complicated process of integrated circuit fabrication requires many steps where visualization is essential to understand the concept. Interactive multimedia modules were developed to present fundamental concepts using animation and playback features. The modules developed served as good learning tools to complement classroom and laboratory instructions. This paper describes the development of interactive multimedia modules created with Macromedia Director and implemented on the standard web browser with Macromedia's Shock Wave plug-in as the interface. The Interactive Modules and online laboratory manual were implemented in undergraduate senior and graduate classes. The impact of these modules and online laboratory manual was assessed from a survey and interview with the students. Almost all students unanimously preferred modules that incorporated animation and interactivity to traditional static images and diagrams. Online laboratory manual and virtual laboratory tour showed a positive impact on student learning.