Effective ionization coefficients in binary gas mixtures of argon and SF/sub 6

Effective ionization coefficients in binary gas mixtures of argon and SF/sub 6

The effective ionization coefficients are evaluated in the E/N range of 60 /spl les/ E/N /spl les/ 420 Td for the Ar + SF/sub 6/ binary gas mixture at various mixture ratios. Also, reported in this paper are the electron mean energies and drift velocities at a given E/N for various mixture ratios.

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Dincer, M.S., Hiziroglu, H.R.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Argon
Electron mobility
Equations
Frequency
Information analysis
Ionization
Modems
Plasma applications
Plasma materials processing
Sulfur hexafluoride
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The effective ionization coefficients are evaluated in the E/N range of 60 /spl les/ E/N /spl les/ 420 Td for the Ar + SF/sub 6/ binary gas mixture at various mixture ratios. Also, reported in this paper are the electron mean energies and drift velocities at a given E/N for various mixture ratios.
DOI:10.1109/CEIDP.2001.963563