Acceleration of yield enhancement activity by utilizing real-time fail bitmap analysis

A methodology to enhance baseline yield by utilizing fail bitmap (FBM) analysis is presented in this paper. Yield impact of each process step is estimated from FBM-defect correlation and FBM classification. Statistical accuracy of the data is evaluated by using actual wafer-to-wafer variation of our...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Wataru Shindo, Sugimoto, S., Makara, R., Rattanalangkan, P., Lui, R.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Acceleration Circuits Data analysis Failure analysis Fault diagnosis Feedback Real time systems Tail Throughput Yield estimation
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