New method of extraction of systematic failure component

We propose a novel model, which can describe systematic faults and is applicable to process improvement. In this model, the histogram of the faults is described as the sum of the Poisson distribution and the negative binomial distribution. The latter originates from the systematic failure component....

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Bibliographische Detailangaben
Hauptverfasser:	Mitsutake, K., Ushiku, Y., Arakawa, Y., Ishibumi, T., Ito, O.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Histograms History Indium tin oxide Manufacturing processes Optimization methods Production Productivity Redundancy Semiconductor device manufacture Virtual manufacturing
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Beschreibung
Zusammenfassung:	We propose a novel model, which can describe systematic faults and is applicable to process improvement. In this model, the histogram of the faults is described as the sum of the Poisson distribution and the negative binomial distribution. The latter originates from the systematic failure component. By combining the analysis of the degree and the position of the systematic fault with a lot history, the problem of the processes can be solved. In this way, it is possible to enhance yield and increase productivity.
DOI:	10.1109/ISSM.2001.962959