Effects of Semiconduction on Thickness-Extensional Modes of Piezoelectric Resonators

Effects of Semiconduction on Thickness-Extensional Modes of Piezoelectric Resonators

We study thickness-extensional vibrations of a piezoelectric semiconductor plate for resonator application. A perturbation integral for the semiconduction-induced frequency shift is obtained, which shows that the first-order frequency shift represents a damping effect due to semiconduction. Numerica...

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Veröffentlicht in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 2022-02, Vol.69 (2), p.911-912
Hauptverfasser: Ju, Shuai, Zhang, Haifeng, Yang, Jiashi
Format: Artikel
Sprache:eng
Schlagworte:
Aluminum nitride
Charge carrier processes
Damping
Frequency perturbation
Frequency shift
II-VI semiconductor materials
Perturbation
Perturbation methods
piezoelectric plate
Piezoelectricity
Resonators
semiconduction
Thickness
thickness vibration
Vibrations
Zinc oxide
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Beschreibung
Zusammenfassung:We study thickness-extensional vibrations of a piezoelectric semiconductor plate for resonator application. A perturbation integral for the semiconduction-induced frequency shift is obtained, which shows that the first-order frequency shift represents a damping effect due to semiconduction. Numerical results for ZnO and AlN plates are presented.
ISSN:0885-3010
1525-8955
DOI:10.1109/TUFFC.2021.3130542