Alternative fabrication methods for capillary electrophoretic device manufacturing

This work represents research that explores the development of novel manufacturing methods to create microcapillary electrophoretic (CE) devices. Nontraditional substrates that were investigated include polymers such as SU-8, poly dimethylsiloxane (PDMS), acetate, Riston, Kapton, polyimide, and polyester. Hot embossing, chemical etching, micro-molding, wafer level bonding, chemical treatment, and lamination techniques were developed for these substrates. The purpose of this paper is to explore the feasibility of micromachining a select group of alternative materials.