A hybrid-statistical approach for accurate characterization of MEMS on complex platforms

A hybrid-statistical approach for accurate characterization of MEMS on complex platforms

Micro-electromechanical systems (MEMS) are used in a diverse group of fields. In this paper, we are concerned with the communication and sensing applications, particularly in connection with the Reconfigurable Aperture Antenna (RECAP) project. We present a finite element method (FEM)-based approach...

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Hauptverfasser: Ozdemir, T., Sabet, K.F., Yasan, E., Vega, M.C., Ebel, J.L., Creech, G.L., Lesniak, C.D., Katehi, L.P.B., Sarabandi, K.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Aerospace electronics
Bridge circuits
Conductors
Coplanar waveguides
Laboratories
Microelectromechanical devices
Micromechanical devices
Optical filters
Shunt (electrical)
Switches
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Beschreibung
Zusammenfassung:Micro-electromechanical systems (MEMS) are used in a diverse group of fields. In this paper, we are concerned with the communication and sensing applications, particularly in connection with the Reconfigurable Aperture Antenna (RECAP) project. We present a finite element method (FEM)-based approach to characterizing MEMS devices in the presence of radiators. We concentrate on modeling the MEMS switches since this problem has its own challenges. By modeling, we mean extracting a lumped element model consisting of resistors, inductors and capacitors.
DOI:10.1109/APS.2001.960184