Additive deposition and patterning of ferroelectric materials on non-planar surfaces by chemical-solution methods

Recent developments and understanding for the deposition and patterning of ferroelectric thin layers are reported. Two patterning techniques are described for mediated chemical solution deposition by: (i) microcontact printing (/spl mu/-CP), and (ii) micromolding in capillaries (MIMIC). These additi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Mikalsen, E.A., Payne, D.A.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Additives Ceramics Chemicals Etching Ferroelectric materials Optical films Residual stresses Silicon Substrates Tensile stress
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