Additive deposition and patterning of ferroelectric materials on non-planar surfaces by chemical-solution methods

Additive deposition and patterning of ferroelectric materials on non-planar surfaces by chemical-solution methods

Recent developments and understanding for the deposition and patterning of ferroelectric thin layers are reported. Two patterning techniques are described for mediated chemical solution deposition by: (i) microcontact printing (/spl mu/-CP), and (ii) micromolding in capillaries (MIMIC). These additi...

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Bibliographische Detailangaben
Hauptverfasser: Mikalsen, E.A., Payne, D.A.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Additives
Ceramics
Chemicals
Etching
Ferroelectric materials
Optical films
Residual stresses
Silicon
Substrates
Tensile stress
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Beschreibung
Zusammenfassung:Recent developments and understanding for the deposition and patterning of ferroelectric thin layers are reported. Two patterning techniques are described for mediated chemical solution deposition by: (i) microcontact printing (/spl mu/-CP), and (ii) micromolding in capillaries (MIMIC). These additive soft-lithographic methods are demonstrated for the patterning of sol-gel derived lead zirconate titanate (PZT) films on non-planar surfaces.
ISSN:1099-4734
2375-0448
DOI:10.1109/ISAF.2000.941585