Additive deposition and patterning of ferroelectric materials on non-planar surfaces by chemical-solution methods
Recent developments and understanding for the deposition and patterning of ferroelectric thin layers are reported. Two patterning techniques are described for mediated chemical solution deposition by: (i) microcontact printing (/spl mu/-CP), and (ii) micromolding in capillaries (MIMIC). These additi...
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| creator | Mikalsen, E.A. Payne, D.A. |
| description | Recent developments and understanding for the deposition and patterning of ferroelectric thin layers are reported. Two patterning techniques are described for mediated chemical solution deposition by: (i) microcontact printing (/spl mu/-CP), and (ii) micromolding in capillaries (MIMIC). These additive soft-lithographic methods are demonstrated for the patterning of sol-gel derived lead zirconate titanate (PZT) films on non-planar surfaces. |
| doi_str_mv | 10.1109/ISAF.2000.941585 |
| format | Conference Proceeding |
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Two patterning techniques are described for mediated chemical solution deposition by: (i) microcontact printing (/spl mu/-CP), and (ii) micromolding in capillaries (MIMIC). These additive soft-lithographic methods are demonstrated for the patterning of sol-gel derived lead zirconate titanate (PZT) films on non-planar surfaces.</description><identifier>ISSN: 1099-4734</identifier><identifier>ISBN: 0780359402</identifier><identifier>ISBN: 9780780359406</identifier><identifier>EISSN: 2375-0448</identifier><identifier>DOI: 10.1109/ISAF.2000.941585</identifier><language>eng</language><publisher>IEEE</publisher><subject>Additives ; Ceramics ; Chemicals ; Etching ; Ferroelectric materials ; Optical films ; Residual stresses ; Silicon ; Substrates ; Tensile stress</subject><ispartof>ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on Applications of Ferroelectrics (IEEE Cat. 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These additive soft-lithographic methods are demonstrated for the patterning of sol-gel derived lead zirconate titanate (PZT) films on non-planar surfaces.</description><subject>Additives</subject><subject>Ceramics</subject><subject>Chemicals</subject><subject>Etching</subject><subject>Ferroelectric materials</subject><subject>Optical films</subject><subject>Residual stresses</subject><subject>Silicon</subject><subject>Substrates</subject><subject>Tensile stress</subject><issn>1099-4734</issn><issn>2375-0448</issn><isbn>0780359402</isbn><isbn>9780780359406</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2000</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNp9jzFPwzAUhK1CJVJgR0zvDzh9SRySjBWigrndK9d-oUaOHWwXqf8eC5iZ7qT77qRj7KHCsqpwWL_tNtuyRsRyEFXbtwtW1E3XchSiv2Ir7Hps2kFgfc2KzA9cdI24YasYPxBz70kU7HOjtUnmi0DT7GO23oF0GmaZEgVn3Dv4EUYKwZMllYJRMMkcGWkjZNh5x2crnQwQz2GUiiIcL6BONBklLY_enn9WJ0onr-MdW465Svd_essety_751duiOgwBzPJcDn8Pmr-Db8BmlVOpg</recordid><startdate>2000</startdate><enddate>2000</enddate><creator>Mikalsen, E.A.</creator><creator>Payne, D.A.</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope></search><sort><creationdate>2000</creationdate><title>Additive deposition and patterning of ferroelectric materials on non-planar surfaces by chemical-solution methods</title><author>Mikalsen, E.A. ; Payne, D.A.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-ieee_primary_9415853</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2000</creationdate><topic>Additives</topic><topic>Ceramics</topic><topic>Chemicals</topic><topic>Etching</topic><topic>Ferroelectric materials</topic><topic>Optical films</topic><topic>Residual stresses</topic><topic>Silicon</topic><topic>Substrates</topic><topic>Tensile stress</topic><toplevel>online_resources</toplevel><creatorcontrib>Mikalsen, E.A.</creatorcontrib><creatorcontrib>Payne, D.A.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Xplore</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Mikalsen, E.A.</au><au>Payne, D.A.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Additive deposition and patterning of ferroelectric materials on non-planar surfaces by chemical-solution methods</atitle><btitle>ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on Applications of Ferroelectrics (IEEE Cat. No.00CH37076)</btitle><stitle>ISAF</stitle><date>2000</date><risdate>2000</risdate><volume>1</volume><spage>417</spage><epage>420 vol. 1</epage><pages>417-420 vol. 1</pages><issn>1099-4734</issn><eissn>2375-0448</eissn><isbn>0780359402</isbn><isbn>9780780359406</isbn><abstract>Recent developments and understanding for the deposition and patterning of ferroelectric thin layers are reported. Two patterning techniques are described for mediated chemical solution deposition by: (i) microcontact printing (/spl mu/-CP), and (ii) micromolding in capillaries (MIMIC). These additive soft-lithographic methods are demonstrated for the patterning of sol-gel derived lead zirconate titanate (PZT) films on non-planar surfaces.</abstract><pub>IEEE</pub><doi>10.1109/ISAF.2000.941585</doi></addata></record> |
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| ispartof | ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on Applications of Ferroelectrics (IEEE Cat. No.00CH37076), 2000, Vol.1, p.417-420 vol. 1 |
| issn | 1099-4734 2375-0448 |
| language | eng |
| recordid | cdi_ieee_primary_941585 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Additives Ceramics Chemicals Etching Ferroelectric materials Optical films Residual stresses Silicon Substrates Tensile stress |
| title | Additive deposition and patterning of ferroelectric materials on non-planar surfaces by chemical-solution methods |
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