Chemical-solution processing and patterning of integrated ferroelectrics

In this paper we report the chemical-solution processing of dense insulating ferroelectric thin layers with emphasis on the patterning of device structures. A review is presented for a wide range of patterning techniques and details are reported for new additive methods that appear suited for ferroe...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Mikalsen, E.A., Payne, D.A., Clem, P.G.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Chemical processes Ferroelectric materials Insulation Laboratories Lead compounds Optical materials Polarization Residual stresses Substrates Thermal stresses
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