A Novel MEMS Impedance Tuner Simultaneously Optimized for Maximum Impedance Range and Power Handling

A Novel MEMS Impedance Tuner Simultaneously Optimized for Maximum Impedance Range and Power Handling

This paper introduces a novel design technique for developing microwave MEMS impedance tuners. Unlike existing designs we simultaneously optimize both the impedance coverage and power handling of the tuner. This allows the tuner to be used in real-life load-pull systems where power handling is equal...

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Bibliographische Detailangaben
Hauptverfasser: Lu, Yumin, Katehi, Linda P.B., Peroulis, Dimitrios
Format: Tagungsbericht
Sprache:eng
Schlagworte:
contact-less device
high power
Impedance
Impedance tuner
MEMS capacitor
Micromechanical devices
Microwave theory and techniques
reliability
Silicon
Substrates
Tuners
Varactors
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Beschreibung
Zusammenfassung:This paper introduces a novel design technique for developing microwave MEMS impedance tuners. Unlike existing designs we simultaneously optimize both the impedance coverage and power handling of the tuner. This allows the tuner to be used in real-life load-pull systems where power handling is equally important to impedance tuning. We further increase the power handling by utilizing contact-less MEMS varactors that can reliably handle more than 3.5 W of power. These principles are demonstrated with a 30 GHz tuner that exhibits very wide impedance tuning and an improvement of 4.5 times (compared to conventional MEMS designs) in terms of the power it can deliver.
ISSN:0149-645X
2576-7216
DOI:10.1109/MWSYM.2005.1516575