The design of a miniature injector for microengineered GC system

The design of a miniature injector for microengineered GC system

This paper describes the design and fabrication of a miniature injector for microengineered gas chromatography (GC) system. Both the injector and the micro GC are to be fabricated on silicon using microengineering technology. The injector system incorporates four miniature valves interconnected usin...

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Bibliographische Detailangaben
Hauptverfasser: Wiranto, G., Soegandi, T.M.S., Muljono, M., Widodo, S., Hermida, I.D.P.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Actuators
Fabrication
Gas chromatography
Laboratories
Microchannel
Microelectronics
Microfluidics
Microvalves
Silicon
Valves
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Beschreibung
Zusammenfassung:This paper describes the design and fabrication of a miniature injector for microengineered gas chromatography (GC) system. Both the injector and the micro GC are to be fabricated on silicon using microengineering technology. The injector system incorporates four miniature valves interconnected using short microchannels such that a total of 4 nl sample can be injected into the microengineered GC column. This device should also find wide applications in the area of microfluidic systems.
DOI:10.1109/SMELEC.2000.932439