RF magnetron sputtering of Bi-Sr-Ca-Cu-O thin films

RF magnetron sputtering of Bi-Sr-Ca-Cu-O thin films

Thin films of the high-T/sub c/ material Bi-Sr-Ca-Cu-O were prepared by the RF-magnetron technique from a single reacted and sintered target in pure argon atmosphere on sapphire substrates. The samples were annealed for three minutes in pure oxygen at 810 degrees C. Their composition was studied by...

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Veröffentlicht in:IEEE transactions on magnetics 1989-03, Vol.25 (2), p.2553-2555
Hauptverfasser: Kussmaul, A., Roesler, G.M., Tkaczyk, J.E., Moodera, J.S., Hao, X., Gibson, G.A., Meservey, R., Tedrow, P.M.
Format: Artikel
Sprache:eng
Schlagworte:
Annealing
Argon
Atmosphere
Magnetic materials
Radio frequency
Sputtering
Substrates
Superconducting films
Superconducting magnets
Superconducting materials
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Zusammenfassung:Thin films of the high-T/sub c/ material Bi-Sr-Ca-Cu-O were prepared by the RF-magnetron technique from a single reacted and sintered target in pure argon atmosphere on sapphire substrates. The samples were annealed for three minutes in pure oxygen at 810 degrees C. Their composition was studied by Rutherford backscattering. The superconducting transition was very broad, with R=O at 65 K for the best film. MgO substrates and nonsintered targets were also used. The behavior of the resistance in a magnetic field (up to 20 T) was studied.< >
ISSN:0018-9464
1941-0069
DOI:10.1109/20.92826