19-Element 2D Top-Emitting VCSEL Arrays

We achieve 200 mW optical output power, 18 GHz bandwidth, and 35% wall plug efficiency with 19-element (novemdecuple) top-surface-emitting 980 nm oxide-confined vertical-cavity surface-emitting laser (VCSEL) arrays - a record combination of these three attributes. We grow wafers by metal-organic vapor phase epitaxy and process arrays into a unique two-dimensional honeycomb geometry with top mesa inter-VCSEL ridge connectors and p-metal anode interconnections. We study the impact on array performance of inter-VCSEL spacing and bottom n-doped mesa area. The top emitting VCSELs are optically uncoupled but electrically connected in parallel via anode ring-to-ring p-metal along the ridges and a common horseshoe ohmic cathode n-metal. We demonstrate the potential of our arrays as sources for optical wireless communication via 25 Gb/s data transmission tests.